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	2.020		Ultra Precision Elevation Stage UPL-160

	Key features Travel range 26 mm (1") Bi-directional repeatability +/- 0.1 µm Linear scale central mounted Load capacity lifetime Maximum speed 30 mm/sec Crossed-roller bearings Strength stress-relieved aluminium Load capacity up to 30 kg Limit switches integrated 20.000 hour MTBF Module combination

F A C T S
Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (N)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
DC-B-041	200	100	300	175	49	175	3	1
2Phase-070	200	100	300	175	49	175	3	1

 

D E S C R I P T I O N The Ultra Precision Elevation Stage UPL-160 is the logical supplement to the Ultra-Precision-Linear Stages UPM-160. Ultra-Precision-Elevation Stages of the structural series 160 are specially employed for the Wafer Sub Surfaces Inspection, Fiber Alignments, High Precision Robotic and for all tasks where maximum positioning accuracy and reliability are absolutely necessary. Due to high-quality double crossed roller bearings a high stiffness and smooth move are achieved. A special, stressfree tempered Al-alloy guarantees a  homogeneous non-warping structure. The Ultra-Precision-Elevation Stage UPL-160 is offered with 2-phase-micro-step motor or with DC-motor-micro-step motor. UPL-160 is equipped with a

linear encoder installed between the guide resulting in an accuracy of +/- 0.1 µm/30 mm. The Ultra-Precision-Elevation Stage UPL-160 is standard equipped with two mechanical limit switches. Optional contactless (magnetic/optical) limit switches can be mounted. The Ultra-Precision-Elevation Stage is calibrated supplied with a test certificate (flatness, straightness & position). The measurement is made mounted and unloaded on granite with a flatness < 1 µm.

 

Technical data
Travel Range (mm)	26
Bi-directional Repeatability (µm)	+/- 0.1
Accuracy (µm)	+/- 0.1 ... 0.4
Velocity Range (mm/sec)	0.001 ... 30
Straightness / Flatness (µm)	+/- 1.5
Pitch (µrad)	+/- 40
Yaw (µrad)	+/- 25
Ballscrew Pitch (mm)	2
Speed max. (mm/sec)
DC-B-041	60
2Phase-070	40
Resolution Closed-Loop (µm)
LS-010, Linear steel scale	0.1
LS-020, Linear glass scale	0.005 ... 0.1
Current (Amps) / Voltage (Volts)
DC-B-041	3.8 | 24
2Phase-070	2.8 | -
Material	Special Alu, black anodized
Weight (kg)	8.7

 

 

UPL-160 Motors
	DC-B-041		2Phase-070

 

 

UPL-160 Base

 

 

UPL-160 Ordering information
		DC-B-041 2Phase-070 1 2   26 mm (1") 1 LS-010, Linear steel scale LS-020, Linear glass scale 1 2