Ultra Precision Rotation Stage UPR-100 AIR

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	4.026		Ultra Precision Rotation Stage UPR-100 AIR

Key features
	High precision air bearings
	Free center hole 20 mm diameter
	Torque motor
	Flatness < 0.2 µm
	Eccentricity < 0.2µm
	Wobble < 5 µrad
	Repeatability 0.0002°
	Angular scale
	Speed up to 360°/sec
	Load up to 1.5 kg
	Clean room compatibility

F A C T S
Load Characteristics	Fx (N)	Fz (N)	Mx (Nm)	Mz (Nm) (Peak)	Mz (Nm) (Con.)	ka (µrad/Nm)
TM-030	7.5	15	0.16	0.5	0.25	–

D E S C R I P T I O N

Air bearing Ultra-Precision-Rotation Stages of the structural series UPR-100 AIR and UPR-160 AIR are utilized wherever a maximum of quality concerning running and positioning accuracy is requested. UPR-100 AIR Rotation Stages are mainly employed for measuring-, calibrate-, inspection systems and they are perfectly suited for mask exposition in semiconductor technologies. All Rotation Stages UPR-100 AIR are directly driven by a torque motor. Standard Rotation Stages UPR-100 AIR are equipped with angular systems. Standard resolutions up to 0.0002° can be achieved. For need of better positioning accuracies, resolutions Rotation Stages UPR-100 F AIR can be offered with different angular systems. All Ultra-Precision-Rotation Stages UPR-100 AIR are equipped with a contactless reference- and limit switch.

Technical data
Rotation Range (°)	360, endless
Worm Gear reduction	–
Accuracy (°)	+/- 0.002776
Repeatability (°)	+/- 0.0002
Reversal Error (°)	–
Velocity Range (°/sec)	0.02 ... 360
Flatness (µm)	+/- 0.1
Eccentricity (µm)	+/- 0.1
Wobble (µrad)	+/- 2.5

Speed max. (°/sec)
TM-030	360

Resolution Closed-Loop (°)
AE-080, Angular scale (50-times interpolation)	0.0002

Winding Constant
Torque constant (Nm/Ams)	-
Back EMF constant, peak value V/(rads/sec)	-
Electrical resistance at 80° (Ohm)	-
Electrical inductance (mH)	-
Continuous current at 80° (Ams)	-

Compressed Air compare DIN ISO 8573-1
Leakage rate (L/min)	18 ... 20
Compressed Air range (bar)	4.5 ... 5.5

Material	Special Aluminium, black anodized
Weight (kg)	1.2

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UPR-100 AIR Base & Motors

Rotation range

360°, endless

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

UPR-100 AIR Ordering information
Ultra Precision Rotation Stage		Order-No.
UPR-100 AIR		6823-9-1111

Ultra Precision Rotation Stage AIR options		Order-No.
Air Supply compare DIN ISO 8573-1 Compressed Air	Technical data: Particular size .......... Class 1 Contained Oil ........... Class 1 Condensing point .... Class 2-3	K700-4-001
Air Checker	Pressure Sensor with motor disable	7160-9-123

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.