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New Facility for testing vacuum compatibility of measuring systems
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VACUUM & CRYO
Stages
Accessories
Vacuum analysis
Products & SystemspfadVACUUM & CRYO
<< backwards VACUUM & CRYO forwards >>
navVACUUM & CRYO applications are becoming more essential due to technologies that can only be applied in vacuum and cryogenic. For over 14 years, miCos has applied its extensive vacuum and cryogenic experience to the motion technology field. We supply components and systems for vacuum levels from 10-3 mbar to 10-9 mbar. Most of our standard products are designed with Cryogenic Linear Stage /EADS project 'James Webb Telescope'/ High End Measurement Haidenhain Glass Scalevacuum applications in mind allowing us to easily convert our broad range of stages to be vacuum compatible. We also apply our vacuum expertise to complete turnkey system solutions.
navVacuum: For specifying the necessary vacuum level it is important to analyze the application. Coating of optics, epitaxy or cristallography are different in the necessary vacuum level aswell as mass spectroscopy or others. Not the general vacuum level of 10-6 or 10-9 mbar is often important but the partial pressure of hydrocarbons.New Facility for testing vacuum compatibility of measuring systems As a result of using a wrong grease with higher vapor pressure or use of plastics these hydrocarbons can be a source of contamination of surfaces. Especially laser applications in the UV range are critical because the hydrocarbons can be split into fragments and these fragments can be deposed on optics. The choice of materials and handling processes are at the end the most important points to get the right vacuum stage.
  

  • Overview

  • Low
    Vacuum

  • High
    Vacuum

  • Ultra High
    Vacuum


  • Cryo

  • Space
    Application

  • Extreme
    Environment

Overview
Vacuum class abbrev. Temperature range * Pressure **
Low Vacuum FV -20°C ... +150°C      1 - 10-3   mbar
High Vacuum HV -20°C ... +200°C 10-3 - 10-7   mbar
Ultra-high Vacuum UHV -20°C ... +300°C 10-7 - 10-11 mbar
Extreme Ultra-high Vacuum EUHV              10-12 mbar
Ultra-high Vacuum Cryo UHVC -270°C ... +40°C            10-11 mbar
* the values refer to the vacuum motors ready to use
** classification of the vacuum classes gerneral terms
Preparation
navAlmost all miCos stages can be prepared for FV, HV and UHV. For UHV vacuum class all components are made for 10-9 mbar. Special UHV motors, cables controlers, greases and coatings are used. Following Vacuum ICON in our product pages display vacuum option.
navDefinition Vacuum. Vacuum is defined {DIN 28400} as pressure lower than nomal air pressure. A system is in vacuum if the pressure is lower than the atmospherical pressure. The miCos website uses mbar as a unit of air pressure. Other pyhysical units commonly used are Pascal {Pa} and Torr {Torr}.
 
navDefinitions / ICON navMovie UHVC PRS-110 Setup {N2} Liquide
Vaccum Option Vaccum Option
Cryogenic Option Cryogenic Option
Clean Room Option Clean Room Option
Climate Option Climate Option
Low Vacuum
navPreparation category
navstandard motor
navstandard measuring system, if measuring system required
navstandard wiring
navstandard connector fo plug connection
navstandard limit switch
navall Al parts are anodized
navstainless steel screws
navall guidance and driving elements are equipped with vacuum grease
navOutgassing temperature max. +50°C
SpaceFAB Low Vacuum
High Vacuum
navPreparation category
navspecial vacuum motor
navmeasuring system modified for the use in vacuum
navmotor and limit switches equipped with telflon braids 1m leght wired to a test plug
navstandard limit sweitches with plastic part
navall Al parts left un-anodized
navstainless steel screws
navall guidance and driving elements are equipped with vacuum grease
navno use of CuZn alloys
navall holes are vented
Precision Rotation Stage PRS-200 High Vacuum
Ultra High Vacuum
navPreparation category
navspecial vacuum motor
navmeasuring system modified for the use in vacuum
navmotor and limit switches equipped with telflon braids 1m leght wired to a test plug
navno limit switches, but can be offered with special UHV limit switches
navall Al parts left un-anodized
navstainless steel screws are Ag coated with degass drilling (apart from M3 thread)
navbearing and driving elements made of hardned stainless steeel and epuipped with
vacuum grease
navno use of CuZn alloys
navno use of plastics, unless so desired after consultation with the customer
navall holes are vented (if possible)
Precision Linear Stage PLS-85 UHV application
Cryo
navPreparation category
navcryogenic special vacuum motor
navmeasuring system modified for the use in vacuum
navmotor and limit switches equipped with telflon braids 1m leght wired to a test plug
navno limit switches, but can be offered with special UHV limit switches
navall Al parts left un-anodized
navstainless steel screws are Ag coated with degass drilling (apart from M3 thread)
navbearing and driving elements made of hardned stainless steeel and epuipped with
vacuum grease
navno use of CuZn alloys
navno use plastics, unless so desired after consultation with the customer
navall holes are vented (if possible)
Linear Stage LS-110 Ultra High Vaccum Cryo - Sonder Stage EADS
Space Application
navPreparation category

navStages for operation in space
navHigh shock and vibration loads
navVacuum up to 10-11 mbar
navTemperature ranges depend on the application
navRadiation resistance up to 10-6 J/kg
navOutgassing holes to avoid pockets of trapped gas
Micro Stage MT-40 Space
Extreme Environment
navCategories

navNon magnetic
navClimate application
navClean Room application
navOutdoor application powerd by batteries
navHigh humidity application
navWorking in high magnetic field
Precision Rotation Stage PRS-110 Climate application
 
navWhen stages are used in vacuum please consider the follwing:
navUse low speed operation, max. motor speed 10 rev/s
navShorter life time expectation
navStages can only be run in vacuum or flowbox
navStages are delivered with test plugs, not designed for vacuum (see vacuum options)
navOutgassing temperature max. +80°C

  

navmiCos prefered materials for VACUUM & CRYO Stages are:

navStainless steel
navAluminium
navTitanium
navBronze
navViton
navCeramic
navSapphiere
navTeflon
navPEEK
navKapton
navMacor

  
navElectronic devices such as controller, amplifier and other electronic devices supplied by miCos are not made for vacuum use. Therefore, they must be placed outside the vacuum chamber or in an athmosphare box.
navPlease Note: miCos supplies vacuum-prepared stages with test plugs first, which cannot be used in vacuum! The plug has to be disconnected and replaced by a vacuum plug by the customer. Vacuum feedthroughs, connectors and other accessories can optionally be obtained from miCos.
  
navAll Product Innovations in 2010 can be found here.
navDownload the complete MAC PhotonX 2007 catalog 10 MB
navDownload the complete MOTION CONTROL VOL9 catalog 38 MB
navImprint © 2010 miCos GmbH - All rights reserved.
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