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 VACUUM & CRYO Stages The product field VACUUM & CRYO shows only a part of our standard product range and will be extended constantly. At each product page you can click under description for further informations about the product´s vaccuum suitability.
Technical info: Prior to accepting an order for HV and UHV stages, a thorough review of technical requirements will be performed to determine th e best possible solution. Grease and/or oil lubrication is present in all vacuum stages with the exception of oil-free UHV conditioned stages. Oil-free, UHV vacuum conditioning is not available for all stagemodels. Most stages can be fitted with optional linear encoders (angularencoders for rotary stages). Contact miCos for specifications andpricing. Belt driven stages are only available in FV configurations, as belt material is incompatible with HV and UHV vacuum environments. All Vacuum motors will ge nerate outgassing during operation and motor warm-up. miCos can not guarantee specific outgassing rates and/or outgas-free operation for motors.
Please note: All specifications on the further product pages do not correspond to the vaccuum modifications but serve for informational purposes only. Detailed vaccuum specifications and cryonic operations can be answered on request.
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Intro
Robotic
- Engineered
Systems
- Linear
Stages
- Rotation
Stages
- Manual
Stages
- Download
Scientific Reports
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 SpaceFAB SF-3000 BS HV
 Six axes micro robot system
Compact, low profile system, ballscrew
Travel ranges linear 50 x 12.7 x 100 mm
Travel ranges rotation Rx, Ry, Rz 10°
Load capacity 3 kg center mounted
Pivot poin tcan be se tby the customer
Including software, co ntroller and amplifiers
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SpaceFAB SF-3000 BS UHV
Six axes micro robot system
Compact, low profile system, ballscrew
Travel ranges linear 50 x 12.7 x 100 mm
Travel ranges rotation Rx, Ry, Rz 10°
Load capacity 3 kg center mounted
Pivot poin tcan be se tby the customer
Including software, co ntroller and amplifiers
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Hexapod PAROS HV
Six axes PArallel Robot Operating System
Travel ranges linear 200 x 200 x 80 mm
Travel ranges rotation Rx, Ry 30°, Rz 60°
Maximum speed 30 mm/sec (leg speed)
Repeatability in space ±30 µm
High stiffness
Including software, controller and amplifiers
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Engineered Systems 5 axes UHV
This postitioning system was designed for a
custom appliction.
The system uses the linear stages LS-110
and the PLS-85 in addition to
two goniometers (WT-100 & 85)
at the vacuum level of 10-9 mbar
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Engineered Systems FV
5 axes system using VT-80 linear stage
and motorized AMA-45 mirror
mount for use in 10-3 mbar
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Engineered Systems HV
Depending on the application pats are not anodized.
For vacuum levels below 10-7 mbar, all cavities
to eliminate outgassing and components are
assembled using special, cleanroom compatible
screws (Class 100). All stages can be equipped
with vacuum compatible encoders and limit switches. |
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Engineered Systems HV
Gibmble Mount dia 6 inch.
MP-21 HV Pusher
Teltix System
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Engineered Systems HV
Light microscop application
inside vacuum chamber
visible light
motorized objectiv
Justment via MP-15
and Piezo-Motors |
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Ultra
Precision Linear Stage UPM-160 UHV
Travel range up to 205 mm (8")
Uni-directional repeatability down to ± 0.02 µm
Maximum speed 100 mm/sec
Load capacity up to 35 kg
Load capacity up to 35 kg
Integrated linear scale (center mounted)
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Linear Stage LS-180 UHV
Travel range up to 508 mm (20")
Uni-directional repeatability down to ± 0.05 µm
Maximum speed 200 mm/sec
Load capacity up to 100 kg
Integrated limit switches
Optionally: linear scale (center mounted)
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Linear Stage LS-110 UHV
Travel range up to 305 mm (12")
Uni-directional repeatability down to ± 0.05 µm
Maximum speed 90 mm/sec
Load capacity up to 10 kg
Integrated limit switches
Optionally: linear scale (center mounted)
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Precision Linear Stage PLS-85 HV
Travel range up to 155 mm (6")
Uni-directional repeatability down to ± 0.05 µm
Maximum speed 100 mm/sec
Load capacity up to 10 kg
Integrated limit switches
Optionally: linear scale
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Linear Stage MT-65 UHV
Travel range up to 155 mm (6")
Uni-directional repeatability down to ± 0.05 µm
Maximum speed 100 mm/sec
Load capacity up to 10 kg
Integrated limit switches
Optionally: linear scale |
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Micro Stage MTS-65 HV
Travel range up to 52 mm (2")
Uni-directional repeatability down to ± 0.1 µm
Maximum speed 8 mm/sec
Load capacity up to 2 kg
Integrated limit switches
Optionally: linear scale |
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Linear Stage VT-80 FV HV UHV
Travel range up to 300 mm
Uni-directional repeatability down to ± 0.2 µm
Maximum speed 20 mm/sec
Load capacity up to 5 kg
Integrated limit switches |
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Micro Pusher MP-20 L UHV
Travel range up to 75 mm
Uni-directional repeatability down to ± 0.5 µm
Maximum speed 3.5 mm/sec
Force max. 125 N
Integrated limit switches
High resolution
Including both inserts MP-B & MP-F
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Micro Pusher MP-20 S UHV
Travel range 12.5 mm
Uni-directional repeatability down to ± 1 µm
Maximum speed 3 mm/sec
Force max. 20 N
Integrated limit switches
High resolution
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Translation Stage VT-21 L HV
Travel range 26 mm
Load capacity up to 1 kg
Integrated limit switches
Translation Stage VT-21 S HV
Travel range 11 mm
Load capacity up to 1 kg
Integrated limit switches |
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Rotation Stage DT-65 N HV
Uni-directional repeatability down to ± 0.002°
Maximum speed 60 °/sec
Load capacity up to 3 kg
Integrated reference switch
Clear aperture 25 mm
Preloaded worm drive for zero backlash
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Rotation Stage DT-65 N HV
Uni-directional repeatability down to ± 0.002°
Maximum speed 60 °/sec
Load capacity up to 3 kg
Integrated reference switch
Clear aperture 25 mm
Preloaded worm drive for zero backlash
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Rotation Stage DT-80 HV
Uni-directional repeatability down to ± 0.01°
Maximum speed 45°/sec
Load capacity up to 2 kg
Integrated reference switch
Clear aperture 40 mm
Travel range 360°, endless |
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Precision Rotation Stage PRS-200 HV
Uni-directional repeatability down to ± 7.627E-5°
Maximum speed 150 °/sec
Load capacity up to 50 kg
Integrated reference switches
Optionally: angular scale
Clear aperture 120 mm
Preloaded worm drive for zero backlash
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Rotation Stage RS-40 HV
Uni-directional repeatability down to ± 0.005°
Maximum speed 7°/sec
Load capacity up to 2 kg
Integrated reference switch
Clear aperture 20 mm
Worm gear drive
Precise, smooth continuous 360° motion
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Rotation Stage ADT-80 HV
EcoLine in lightweight construction
Clear aperture 40 mm
Travel range 360°, endless
Double row ball bearings
Load up to 1 kg
Module combination
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Products & Systems
