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MOTION CONTROL
Engineered Systems
Controllers
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Linear Stages UPS-150UPM-160HPS-170LS-270LMS-300LMS-230LMS-180LS-180LMS-120LS-120LS-110LMS-100LMS-80LMS-60PLS-85LS-65MTS-65MTS-70VT-75VT-40VT-80LS-40VT-21 LVT-21 SMT-55CS-430MS-8MS-4KT-120MS-bioNPE-200UPL-160ES-100ES-82ES-70ES-65ES-50MA-35MP-20MP-20 LMP-20 SMP-21MP-15ASS-5ELPS-30LPS-35PP-30EPS-30
Rotation Stages
Manual Stages
Accessories
Appendix
Products & SystemspfadMOTION CONTROLpfadLinear StagespfadScan Table MS-4
<< backwards Scan Table MS-4 forwards >>

navDESCRIPTIOn
The scan stages MS-4 with clear aperture of 100 mm were developed for inspection and microscopy applications. Travel ranges in XY are 102 x 102 mm (4" x 4"). Due to their low profile, they are suited for tasks using reflected learn more...
and/or transmitted light microscopy. The scan stage MS-4 is equipped with re-circulating ball screw and two limit switches. Optionally, the scan stages MS-4 can be equipped with a linear scale for higher accuracy.
 
navDefinitions
Vaccum Option Vaccum Option
  Linear or Rotation Feedback Linear or Rotation
Feedback
 
Scan Table MS-4 Load Symbol
navKey features
 navTravel range 102 mm (4") x 102 mm (4")
 navUni-directional repeatability down to 0.25 µm
 navMaximum speed 90 mm/sec
 navLoad capacity up to 3 kg
 navIntegrated limit switches
 navOptionally: linear scale
 navClear aperture 102 x 102 mm
 
navFacts
Load
Characteristics
Fx
(N)
Fy
(N)
Fz
(N)
Mx
(Nm)
My
(Nm)
Mz
(Nm)
kax
(µrad/Nm)
kay
(µrad/Nm)
DC-B-032 15 15 30 0.5 0.5 0.5 350 350
2Phase-032 15 15 30 0.5 0.5 0.5 350 350
navTECHNICAL DATA
Travel range (mm)
102 x 102
Straightness / Flatness (µm) ± 5
Pitch (µrad) ± 200
Yaw (µrad) ± 200
Orhogonality (µrad) 150
Weight (kg) 3.8
 
Motor (Pitch 2 mm) DC-B-032 2Phase-033  
Linear scale     LS-050
Speed max. (mm/sec) 90 35  
Resolution calculated (µm) 1 (RE) 10 (FS) 0.05
Resolution typical (µm) 1 0.5 0.2
Bi-directional Repeatability (µm) ± 5 ± 5 ± 0.5
Uni-directional Repeatability (µm) 2 2 0.25
Nominal Current (A) 2.3 1.2  
Voltage Range (V) 24    
Accuracy on request
Velocity Range (mm/sec) 0.001 ... 90
Material Aluminium, black anodized
navNote:
nav
More info:
FS = full step, RE = rotary encoder
Detailed info, concerning the motors and encoders, see: Appendix...
  • MOTOR SIZE
  • DRAWING INFO
  • ORDERING INFO & DETAILS ON REQUEST
         
drawing info
Please fill in all fields marked with * 
Order no.: * 6315-9-

       
Motor: DC-B-032 1      
2Phase-032 2      
Travel range: 102 mm (4") x 102 mm (4")   0    
Encoder: without LS-050   0  
LS-050, Linear steel scale   1  
Switches: MLS-020, Mechanical limit swiches   1
HLS-010, Hall limit switches   2
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